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PAPER

Our article is published on Electrochemistry Communications.

Our article is published on Electrochemistry Communications.
T. Homma, A. Kato, M. Kunimoto, M. Yanagisawa, “Direct observation of the diffusion behavior of an electrodeposition additive in through-silicon via using in situ surface enhanced Raman spectroscopy”, Electrochem. Commun., 88, 34-38 (2018).